Wet Process Monitoring System
The WetRad2 is an in-line, real-time, non contact concentration meter, using dual wavelength radiometery to enable cost-efficient monitoring of wet process chemicals. With its unique dual wavelength radiometer and by using pre-selected wavelengths, the WetRad2 is optimized to monitor a specific single component within a complex chemical mix.
The WetRad2’s compact design is based on CI's renowned and reliable NTM platform which is installed in thousands of process chambers working 24/7, for the monitoring of semiconductor processes.
When integrated into a control system, the WetRad2 enables tighter process control and identifies process excursions before they affect yield.
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