The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

Superior Concentration Measurement Stability: Introducing FlowCell+

10.05.2022

FlowCell+ is CI Semi’s New Self-Calibrating, High Stability Flow Cell for Concentration Monitoring (Patent Pending)

 Features:

  • FlowCell+ provides significantly improved measurement capabilities at lower concentrations.
  • Self-calibration design means longer time between calibrations - increasing tool up time.
  • Some applications are Plug-and-Play - with no calibration required after installation or after periodic lamp replacement.
  • Improved immunity to environmental and flow cell temperature changes.
  • Compatible with WetSpec concentration monitors.

Specifications:

  • Fluid temperature up to 75 °C (higher temperatures on request).
  • Wetted materials - Sapphire, TFM-PTFE and FFKM O-rings. Standard ¼” Flaretek ® fittings for easy installation (other fitting types and sizes on request).
  • Air activated - requires 2 atm CDA supply.
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